GC-DIELEC
Advanced Dielectric Film Coating Technology: GC-DIELEC
GC-DIELEC encompasses a variety of high-quality dielectric film coatings, like SiO2, SiN, Al2O3, AlN, TiO2, TiN, Nb2O5, ZrO2, and more. These coatings are applied through vacuum coating processes and serve multiple functions, such as insulation, corrosion resistance, high hardness, and surface decoration. They are compatible with silicon wafers, glass, and flexible substrates. GC-DIELEC is perfect for semiconductor and IC package processes, including isolation, passivation, capping, or barrier layers. The high performance and durability of GC-DIELEC can be considered for integration within sensors or chips.
Swipe the table right| Prod ID | Thinkness (nm) | UniformitySpec | File |
|---|---|---|---|
| SiO2 | 10/100/1000 | ±1%, ±5%, ±10% |  |
| SiN | 10/100/1000 | ±1%, ±5%, ±10% | |
| Al2O3 | 10/100/1000 | ±1%, ±5%, ±10% | |
| AlN | 10/100/1000 | ±1%, ±5%, ±10% | |
| TiO2 | 10/100/1000 | ±1%, ±5%, ±10% | |
| TiN | 10/100/1000 | ±1%, ±5%, ±10% | |
| Nb2O5 | 10/100/1000 | ±1%, ±5%, ±10% | |
| ZrO2 | 10/100/1000 | ±1%, ±5%, ±10% | |
Swipe the table right| Use band range | VIS / UV-VIS-NIR | surface quality | 10/5 (MIL-PRF-13830B) or Semi level |
|---|---|---|---|
| Application field | Semi, Reclaim wafer | Marginal zone | ≦2mm |
| Substrate material | Glass, Si or else | warping | <1mm |
| Substrate range (round) | ≦Φ300mm | Adhesion (Bag test) | Pass ISO Class#0 & ASTM Class#5B |
| Substrate range (square) | ≦350*350 mm | hardness | JISK5600, Pencil: ≧9H, Weight: 750g |
| Substrate Thickness Range | 0.1~1.1 mm | reliability test | 85℃ 85% : ≧1000 / 1500 hr |
Product Brief: GC-AR is an anti-reflection film for ultra-thin (≧0.21mm) and large-size substrates (≦12"). We also have wide angle/wide-range Anti-reflection for UV, visible light and Near Infrared (UV-VIS-NIR).
