Plasma Assisted Reactive Magnetron Sputtering (PARMS) is an innovative sputter method that enhances traditional reactive sputtering. It includes an additional plasma-assisted step, leading to the deposition of precise and uniform coatings. Substrates are cleaned within a vacuum using oxygen plasma from an extra RF-ICP plasma source, ensuring excellent adhesion and the removal of surface contamination. In the first step, the PARMS system utilizes a rotating drum (or plate) substrate that cooperates with a middle-frequency dual magnetron cathode to deposit ultra-thin metal or sub-stoichiometric oxide films. As the layer passes under the oxygen plasma from the RF-ICP source in the second step, it rapidly transforms into a non-absorbing oxide film. This process guarantees coatings of superior quality and outstanding performance for various optical oxide films in a single plasma-assisted reactive cycle at high sputter yields.

PARMS is particularly well-suited for mass-producing highly precise and reliable optical-filter coatings, making it an excellent choice for various applications. These applications include vehicles, mobile devices, AR/VR/MR, and medical products. The advanced capabilities of PARMS enable it to create optical filters with exceptional performance and durability, meeting the stringent demands of modern industries.

Compared with IBAD or IBS system, PARMS system has more advantages in terms of system stability, production capacity and production cost.